DeepOHeat-v1 (2025)
A physics-informed thermal surrogate model quickly predicts hot plate and wafer temperature fields.
Benchmark architecture
THERMAL / BAKE
Bake & thermal equipment
Thermal / Bake
Thermal processing that manages thermal budget and batch consistency.
EQUIPMENT SCOPE
Equipment scope
- KOKUSAI ELECTRIC (KE) bake and thermal equipment
- TAZMO bake and thermal equipment
Focused on leading Japanese brands, covering hot plate modules and batch thermal equipment.
SERVICES
Services provided
- Equipment procurement, evaluation and tool selection
- Tool condition inspection and acceptance support
- De-installation, packing and cross-border shipping
- Move-in installation and temperature uniformity tuning
- Heater module maintenance and spare parts planning
- Thermal process condition setup
- Operator and maintenance staff training
AI INTEGRATION
AI integration
The third-party frontier architectures BETTER benchmarks and deploys.
ThermEDGe / IREDGe
Time-varying power and heating distribution predict temperature contours and locate thermal non-uniformity.
Benchmark architecture
Batch thermal process digital twin
Simulates batch ramp profiles and wafer boat position differences to optimize thermal budget allocation.
Benchmark architecture
USE CASES
Where it fits
- Lines needing consistent photoresist bake and thermal steps
- Advanced node processes with a constrained thermal budget
- Thermal equipment relocation and recalibration
- Research institutes building thermal process capability
GET IN TOUCH
Let's talk about your line
One point of contact from equipment selection through installation and AI integration.